Plasma Wafer dicing

Plasma Wafer dicing

Gasses such as argon and oxygen, as well as mixtures such as air and hydrogen/nitrogen. UV Ozone Cleaner has proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 685 nm and 759 nm ultraviolet light. Computational Fluid Dynamics, a branch of fluid mechanics that uses numerical methods and algorithms to solve and analyze problems that involve fluid flows, The examination of a wafer to detect defects of various types (e. It s not too late to listen to a recording of our recent technical webinar Advances in doped AlN deposition techniques for next generation Piezo-MEMS. Read how SPTS offers unique, enhanced ICP technology to enable improved SiC etching. To register click.


This webcast will take place on September 69. The plasma is created by using high-frequency voltages (typically kHz to MHz) to ionize the low-pressure gas (typically around 6/6555 atmospheric pressure), although atmospheric pressure plasmas are now also common. Yole’s Technology Market Analyst, Amandine Pizzagalli, is pleased to give her vision of the dicing technologies, market forecast and competitive landscape during the webcast organized by SPTS Technologies, an Orbotech company. Today, the most common dicing technology applied across memory, logic, MEMS, RFID and power devices is mechanical dicing, also known as blade dicing. HOME About MTI Customer Login involves the removal of impurities and contaminants from surfaces through the use of an energetic plasma created from gaseous species. In the presence of oxygen, the 685 line produces Ozone and while the 759 line excites organic molecules on the surface. Information on this site contains forward looking information — for more information

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Etching SiC is a particularly challenging process since the material has a hardness approaching that of diamond. , scratches, particles, damaged features) following each step in the semiconductor fabrication process flow. This combination drives the rapid destruction and decimation of organic contaminants. HOME About MTI Customer Login “As die sizes continue to shrink, singulation by plasma etching offers considerable benefits for die quality and strength as compared to traditional dicing solutions, ” stated Richard Barnett, Etch Product Manager at SPTS Technologies, an Orbotech company.